Fan builder recreates ASML's exclusive Lego EUV machine with 810 custom pieces

ASML unveiled a Lego representation of its TWINSCAN EXE:5000, the first High-NA EUV lithography system, in December 2024. The company restricted sales to its own workforce, canceling purchases from outside buyers and driving secondary-market prices to $500–$700 on eBay—well above the $230 retail price on ASML's internal store. That scarcity caught the attention of Rebrickable users, where one builder has now published a freely available alternative.

The recreated design, credited to NightHawk11991, incorporates 810 bricks across 152 distinct components and includes refinements beyond the original. "A friend of mine fell in love with the ASML employee-exclusive Lego TWINSCAN EXE:5000 set and asked me to recreate it. While the original Lego version already looked impressive, I made some modifications to better capture the details of the real machine," the builder explained. "Using photos my friend took of the actual equipment, I designed this custom MOC to enhance its accuracy. I also added some interior details, including vacuum pumps, a laser emitter, reflectors, and more. Additionally, the silicon wafer tray can slide out for added functionality!"

The project took roughly a week to complete, according to @lithos_graphein, the X user who shared the build. Full PDF instructions and a parts inventory are available at no cost on Rebrickable, though sourcing certain rare bricks may prove challenging. Builders can purchase missing pieces individually if needed.

The same builder previously acquired a rare ASML Special Edition Monopoly board from 2007 by trading an official ASML Lego kit. Corporate merchandise of this kind typically circulates only among employees or through personal connections, leaving ordinary consumers dependent on resale channels. TSMC and SK hynix have similarly released branded merchandise, with some pieces commanding resale prices as high as $16,700.